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We offer a simple but efficient, ergonomic automation for all horizontal furnace platforms.
We offer new and refurbished horizontal furnaces (VCVD & ATM) for 150 & 200 mm diameter wafers.
As the OEM of both the Bruce Diffusion Furnace and Amtech Automation, we continue to support our systems in over 100 sites worldwide. It is with great pride that our controls and equipment built 10, 20 and even 30 years ago continue to produce product for our customers.
For our existing installation base, we continue to support our customers with
- Both New and Refurbished BDF 41 and BDF 200.
- Process Retrofits including the Atmoscan
- Diameter Conversion able to provide a (4) stack 200mm depending on process hardware requirements.
- Automation for Loading Wafer Boats to the Load Station Paddles
- Heating Elements
- Parts, Service & Repairs for the 7355X Controls, APEX Host Systems and Amtech Automation
We continue to support and sell our Automation (S300, Autodoors & Boatloaders) as well as Atmoscan to other OEM horizontal furnaces as these have been integrated and sold as independent or stand-alone units.
Many people continue to tap into Bruce's installation base as source horizontal furnace process/production capacity. As they continue to be a solid source of reliability that our installed base has come to trust over the last 30 years. Contact us to see how Bruce can help you in your decision on buying a used furnace.
While you may have purchased a previously-owned Bruce Diffusion Furnace from a source other than Bruce you are still viewed as part of our customer. Please consider us in your future requirements for parts, retrofits, elements and APEX support.