SYSTEM 2000 WAFER PROCESSING SYSTEM
- 150mm and 200mm Wafer Capability
- Atmospheric or Low Pressure Processes
- 5 Zone (1000mm Flat) Heating Element
- Non-contact Cantilever Loading or Softlander Systems Available
- Fast Cool Core Compatibility
- APEX Supervisory System Compatibility
- RTS-1 Automation Compatibility
HORIZONTAL LAMINAR FLOW LOAD STATION
- Electropolished Stainless Steel Construction
- Class 10 with 0.125 Micron HEPA Filters
- Blowers, Prefilters and HEPA Filters Serviced from Rear to Top
- Enclosed Fluorescent Lighting
- Model 7680 Heavy Duty Boatloaders
- Automation Interface…. Elevator or RTS-1
- Saddle Assembly with 63mm Round Shaft, High Purity SiC Paddle
SCAVENGER ASSEMBLY
- Electropolished, All Welded Stainless Steel Construction
- Quartz Liner for Radially Uniform Exhaust Flow
- Common Plenum Exhaust with Individual Controls
- Process Tube Exhaust with Individual Controls
- Rigid Structural Frame Connection Furnace and Load Island Section
FURNACE SECTION
- Maximum of Four, 5-Zone Elements
- 10 Type “S” Thermocouples per Element
- Temperature Modules Mounted on Front Panels for Ease of Access
- Independent Furnace Overtemperature Protection
- Removable Key Lock Doors and Base Panels
- Water Cooled Heat Exchanger with Fans and Alarms
- Full Heating Length of Element is Supported
- Power Transformer with Zone Dependent SCR’s
SOURCE CABINET
- Efficient “L” Shaped Configuration
- Vertically Mounted Gas Panels for Ease of Access and Service
- Three 200mm Monitored Exhaust Ducts Tied to System Alarms
- All Gas Connections are Made if the Exhausted Cabinet Area
- Electronics are Segregated from the Gas Panel Area
- Rear Tube Pull with Minimum Clearance
- Tube Level Accessory Shelves
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