- Modular System Design
- Load Island Module
- Furnace Module
- Source Cabinet Module
- Up to 125mm Wafer Capability
- Both Atmospheric and V-CVD Processes
- Three Zone Heating Elements
- 760mm or 1000mm Flat Zones Available
- Cantilever Loading
- Direct Digital Control
- Upstream Software Compatibility
HORIZONTAL LAMINAR FLOW LOAD STATION
- Stainless Steel Construction
- Class 10 with 0.125 Micron Hepa Filters, Serviced from the Rear
- Blowers and Prefilters Serviced from the Front
- Enclosed Fluorescent Lighting
- Model 7670 Boatloaders
- Saddle Assembly with 50mm Round Shaft SiC Paddle
SCAVENGER ASSEMBLY
- Welded Stainless Steel Construction
- Common Plenum Exhaust with Individual Damper Controls at Tube Level
- Integral Shroud Design for Circuit Breakers and EPO Switch
FURNACE SECTION
- Maximum of Four, 3-Zone Elements
- 6 Type “S” Thermocouples per Element
- Temperature Modules Mounted on Front Panels for Ease of Access
- Independent Furnace Overtemperature Protection
- Removable Access Doors and Base Panels
- Water Cooled Heat Exchanger with Fans and Failure Alarms
- Element is Supported its Entire Heated Length
- Power Transformer with Zone Dependent SCR’s
SOURCE CABINET
- 36” X 42” Configuration
- Gas Panels Mounted Horizontally
- Gas Electronics Mounted at Tube Level, Above Gas Panel
- Provisions for External Torch
- Access for Maintenance and Furnace Tube Pull
- Tube Level Accessory Shelves with Electrical Outlets
- Provisions for up to Ten Gas Manifolds
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