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BDF41 |
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Inventory Specials |
We are offering discounts. Here is a list of our latest inventory specials. |
MODEL BDF-41 |
FEATURES
- 100mm – 200mm Wafer Processing.
- 7355X Direct Digital Controller.
- 5-Zone (1000mm) Flat Zone Heating Element.
- Atmospheric or Low Pressure Processes.
- Fast Cool CoreTM, Softlanding and Autodoor Compatibility.
- Individual Tube Level All Welded Scavenger Exhaust.
- RTS-1TM Automation and Three-Axis Elevator Compatibility.
- SMIFTM Compatibility.
- ApexTM Process Management Softtware System Compatibility.
CONTROL CABINET
- 7355X Direct Digital Controllers.
- 7680 Boatloader Controllers.
- Quad I/O Modules.
- 24 Volt Power Supply & Distribution Panel.
- Alarm Processor.
- Alarm Panel.
- Optional – 7355X Maintenance Cart.
ALARM PROCESSOR AND DISPLAY PANEL
- Provides visual and audible indication of system and tube level alarms with manual reset. An alarm silence switch is also provided.
- Integrated with system controller fan alarm activated recipe instructions.
- System Alarms includes:
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Load Station Blower Operation
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Scavenger Exhaust
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Mainframe Stack Overtemp
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Mainframe Fan Fail
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Gas Cabinet and Tube Foyer Exhaust
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Instrument Power
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Power Failure
- Tube level alarms are tied to indicator lights at each tube level to expedite diagnostics.
HORIZONTAL LAMINAR FLOW LOAD STATION
- Mirror Finished Stainless Steel Construction.
- Class 10 with 0.125 Micron ULPA Filters.
- Enclosed Fluorescent Lighting.
- Fully Exhausted, Fully Adjustable Boatloaders.
- Optional – Softlander and Autodoor Mechanisms.
SCAVENGER ASSEMBLY
- Electropolished, All Welded Stainless Steel Construction.
- Individual Scavenger Exhaust Lines.
- Individual Tube Photohelic Gauge Exhaust Monitoring.
- Optional – Individual Atmospheric Process Tube Exhaust.
- Rear Furnace Mounted Circuit Breakers and EPO Switch or Optional Integral Shroud Design.
- Optional – Quartz Scavenger Liner for Uniform Exhaust Flow and POCL3 Containment.
FURNACE SYSTEM
- Maximum of Four, 5-Zone Heating Elements.
- (10) Type “S” Thermocouples per Element.
- INTEMPσSTM Intelligent Temperature/Overtemperature Modules Mounted on Front Furnace Panels for Ease of Access.
- Independent Furnace Overtemperature Protection.
- Removable Keylock Bifold Doors and Base Panels.
- Water-Cooled Heat Exchanger with Fans and Alarms.
- Transformers with Zone Dependent SCR’s.
- Fast Cool CoreTM Option.
SOURCE CABINET
- Efficient “L” Shaped Configuration.
- Vertically Mounted Gas Panels.
- Gas Electronics Mounted in an Isolated Exhausted Enclosure.
- Provisions for Series 5000 External Torches.
- Easy Access for Maintenance and Furnace Tube Pull.
- Tube Level Accessory Shelves.
- Provisions for up to (10) Gas Manifolds – 4 Manifolds Standard.
- Optional – Gas Detection Capability.
- 3” Vacuum components Standard on VCVD Systems.
- Optional – Ultraclean Gas Delivery Systems.
BDF-41 FEATURES & ENHANCEMENTS
FROM THE BDF-4