(One APEX node controls up to 16 process tubes)

APEX is a software application that provides a set of tools for automating wafer processing.

• Recipe Management
•  Real Time Tube Status
• Data Collection
• Preventive Maintenance Management
• Statistical Process Control (optional)
• Host Link Interface (optional)
• APEX Systems
• HP B2600 or C3600 Workstations
• HP-UX 10.20 Operating System
• Borland Interbase Database Management System
• Digi Etherlite Remote Multiplexer
• HP Printer/Plotter (PCL-5 / HPGL)

APEX Communications

• Digi Etherlite Terminal Server
• Serial to TCP/IP Protocol over Network
• RS232 Serial Communication to Controller
• HSMS Direct Network Connection to Factory Host (optional)
• 10/100 BASE-T Ethernet utilizing TCP/IP across private network.