The S-300 automated multiple boat horizontal furnace cantilever loading system is a low cost system designed to assist the fab operator in safely loading and unloading wafer boats to all cantilevers on a furnace stack. Operators place boats onto the load platform at an ergonomically correct height eliminating the need for operators to climb ladders or perform the repetitive motion of loading wafer boats onto the silicon carbide paddle. Load times are typically less then 3 minutes. Control and setup is through a single color flat panel touch screen, instructions are in plain English.

The S-300, mounts directly onto the load station and is compatible with any furnace and cantilever system. Using casters and quick disconnect latches the S-300 can be quickly removed from the load station to allow for maintenance. 

Shuttle (option): Design to transfer wafers from Wafer Cassette Transfer machines to the S300.

Slide (option): Designed to allow for installation into fabs with limited small between horizontal load stations. This allows for the operator to stand to the side of automation instead of the rear of the S300.

SECSII/GEM (option): Interface is available for factory host communication.

General Specifications

• Uptime: >98%
• MTBF: 500 Hours
• MTTR: Recovery = 5 minutes
• Repair = 4 Hours
• 100 to 300 mm Wafers
• Max = 300 wafers for 100 mm to 200 mm wafers
• Max = 100 wafers for 300 mm wafer

• Bruce Furnaces
• Tempress Furnaces
• MRL Furnaces
• Thermco Furnaces
• All others possible

Product Specifications