New SCR Pack Design (#9051652)

The S-300 automated multiple boat horizontal furnace cantilever loading system is a low cost system designed to assist the fab operator in safely loading and unloading wafer boats to all cantilevers on a furnace stack. Operators place boats onto the load platform at an ergonomically correct height eliminating the need for operators to climb ladders or perform the repetitive motion of loading wafer boats onto the silicon carbide paddle. Load times are typically less then 3 minutes. Control and setup is through a single color flat panel touch screen, instructions are in plain English.

The S-300, mounts directly onto the load station and is compatible with any furnace and cantilever system. Using casters and quick disconnect latches the S-300 can be quickly removed from the load station to allow for maintenance. 

Shuttle (option): Design to transfer wafers from Wafer Cassette Transfer machines to the S300.

Slide (option): Designed to allow for installation into fabs with limited small between horizontal load stations. This allows for the operator to stand to the side of automation instead of the rear of the S300.

SECSII/GEM (option): Interface is available for factory host communication.

7716 Hydrogen Ignition Module

The 7716 Hydrogen Ignition system was designed as a replacement for the 7616 Hydrogen Burnoff. Updates include up-to-date electronics package with a solid state relay design for longer fault free operation and replacement of the heater coil ignition system with a silicon carbide heater design.

Product Specifications:

• (2) 450 watt Silicon Carbide heaters
  
• (2) CAL3300 temperature readouts to verify 760°C obtained
  
• Warning alarm for failure of one SiC heater
  
• Lock-out alarm for failure of both SiC heaters
  
• Programmable heater ON circuit via function output
  
• 60 Second time delay to allow temperature to reach >760°C prior to enabling alarm monitor circuit.

VCVD Gas Electronics Module

Engineered for additional functionality, with a focus on improved In-situ diagnostics and ease of use, the VCVD Interface IIITM provides a three-fold increase in electrical accuracy in the leak rate measurement circuit. Combine this with an LCD readout, self-diagnostic capabilities and additional status monitoring LEDs, the VCVD Interface IIITM takes a major leap forward in VCVD processing.

Key Benefits

• User selectable pre leak check outgas delay
• Verification of leak rate calibration by self test
• Full 60 second leak check
• Front panel accessible set up adjustments

Specifications

• User selected leak rate trip point
• Range 1-30mTorr
• Increment 1mTorr
• Accuracy +/-2 mTorr
• User Selected outgas delay 0, 30, 60 Seconds
• Self Test - Integrity of leak check circuit verified over two 60-second test cycles

 Key Features

• Improved drift stability and accuracy
• Elimination of daughter boards
• Backward compatibility with our VCVD Interface II board
• LCD display of trip point and vacuum leak information
• Operational status provided by front panel LEDs

5100 External Torch & Controls

External Torch & Controller STARTUP TIMES

• From Cold to Ignition >80 SEC
• From Cold to Max Flow >90 SEC
• With Preheat to Max Flow >30 SEC

PROGRAMMING

• 1 Interval for Basic Programming
• H2 and O2 Set-points & Solenoid Request
• 3 Intervals for preheat mode

RELIABILITY

• Projected MTBF > 5000 HRS
• Tested > 8000 Lamp Starts (650 HRS)
• O-Ring Mounted Injector for Leak-tight Seal
• Single Design Injector for use up to 20 SLM (tested up to 30 SLM)
• Ramp Rate up to 4 SLM/SEC
• No Quartz Sputtering afrer 650 HRS

Download Product Sheets

New SCR Pack Design
7716 H2 Burn Off