Bruce Technologies Inc.
Bruce Technologies Inc.

Controls & APEX

Used Equipment

Bruce Diffusion Furnace

Used Equipment Available.
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OEM of the Bruce Diffusion Furnace (BDF)
High Reliability, Low Cost of Ownership
Over 1000 Furnaces Sold Worldwide
Over 30 Years of Experience
 

Controls & APEX

Inventory Specials


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Controls

APEX Supervisor System

APEX Supervisory System

(One APEX node controls up to 16 process tubes)

APEX is a software application that provides a set of tools for automating wafer processing.

  • Recipe Management
  •  Real Time Tube Status
  • Data Collection
  • Preventive Maintenance Management
  • Statistical Process Control (optional)
  • Host Link Interface (optional)
  • APEX Systems
  • HP B2600 or C3600 Workstations
  • HP-UX 10.20 Operating System
  • Borland Interbase Database Management System
  • Digi Etherlite Remote Multiplexer
  • HP Printer/Plotter (PCL-5 / HPGL)

APEX Communications

  • Digi Etherlite Terminal Server
  • Serial to TCP/IP Protocol over Network
  • RS232 Serial Communication to Controller
  • HSMS Direct Network Connection to Factory Host (optional)
  • 10/100 BASE-T Ethernet utilizing TCP/IP across private network.

7355 Controls

The BDF‑41 System Control is a distributed control system which uses the 7355X DDC Microcontroller as a host and individual microcontroller modules for dedicated control tasks.  All modules are managed by a system controller microprocessor.  Most of the control electronics are housed in a self standing control cabinet located at the end of the load station or adjacent to offset shroud.  Satellite modules are located elsewhere in the Furnace system.

Model 7355X DDC
(operator panel, one per tube level)

  • 2.3 Version Firmware
  • Menu driven from operator front panel.
  • Communications port for upstream APEX Computer.
  • System controller microprocessor.
  • NICAD Battery Backup System
  • Recipe control with the following features:
  • 50 programmable time intervals
  • 56 programmable inputs and outputs are available
  • Automatic abort and hold capability
  • Temperature control for up to six control/profile thermocouple pairs
  • Auto profiling capability at operator request
  • Set-point control for eight mass flow controllers
  • Temperature and gas ramping capability
  • Boatloader control
  • Local storage/retrieval of up to three recipes while a fourth (duplicate) is operating.

Intempos – Temperature Control Module
(Mounted in Furnace Section)

  • Five dedicated control thermocouple channels and five profile thermocouple channels are available. One auxiliary channel is available for options requiring temperature control such as the external torch.
  • Calibrated for “S” thermocouple types (Platinum vs. Platinum 10% Rhodium)
  • Actual Spike and Overtemperature T/C feedback monitored continuously for immediate detection of T/C failure and if failure is detected, transfers control to a Back-up T/C
  • System Calibration is not required
  • Diagnostic Port provides access, using a PC or Terminal, for the following;
  • Overtemperature trip setpoint is set to the heating element maximum operating temperature (is user adjustable).
  • Temperature Control Setup and Calibration
  • Overtemperature T/C readout
  • Individual PID Power Contributions-Real-time Monitoring Capability
  • T/C Failure Recovery Mode Status Monitoring Capability
  • Alarm Status Monitoring Capability
  • Alarm Output and LED indication if an Internal Power Supply is Out of Specification.

Boatloader Control Module:
(one per tube level)

  • Digital speed accuracy control to + 1% of set-point.
  • End Travel position accuracy to ± 0.02” (0.51mm)
  • Easy calibration.
  • Manual override.
  • Integrated EMS push-button and movement indicating light.
  • On-board electronics for paddle lift and autodoor.

Gas Modules
(Mounted in Gas Cabinet Section)

  • Fully integrated with DDC.
  • Interlocks with tube level alarms.
  • Configured for process specific application.

 





73551

Click enlarge schematic below…

Layout



Controls PDF