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They are available in two flat zone lengths, 30” (75cm) or 40” (1m). 40” flat zone elements require a special transformer with increased power capability and special bezel set-ups. Early BDF4s were configured with this on an as needed basis.
The few BDF4s that shipped in 1989 and later had the larger transformer as a standard, and (electrically) can use any of the BDF4 3 zone elements. Around that same time period, the elements were redesigned with new vestibules and insulation that accommodated stronger/longer tube supports and much better thermal seals. As such, the furnace end panel ‘bores’ were increased to utilize these features. Older furnaces must be retrofitted to accommodate this design improvement. Please consult Bruce for your specific application.30" Flat Zone (Atmospheric, 3 Zones, 68" Length)
- 2950704 & 2962048: 100mm wafers, 7.5” ID, 12” OD, up to 1200° C. Will fit all BDF4s, and BDF8s.
- These two elements are electrically identical, and can also use the same profile T/C. The difference is in the end vestibules. The 2962048 is the newer, better element from a process tube seal and construction standpoint, but most of the elements in the field, (and subsequent replacement requests), are for 2950704.
- 2950510 & 2962047: 125mm wafers, 8.25” ID, 13” OD, up to 1200° C. Will fit all but the earliest BDF4s (pre 1980)
- These two elements too are electrically identical, and can also use the same profile T/C. The difference is in the end vestibules. Same issues as above.
- Most 5” replacement elements purchased are 2950510.
- 9650950: 150mm wafers, 9.25” ID, 13.25” OD, up to 1150° C.
- These elements will only fit specific post-1989 BDF 4s. The furnaces were built to accommodate the up-size. The furnace system must also have a BDF41 style load station for tubes 1 & 4 to have sufficient space to fit the wafers.
40" Flat Zone (Atmospheric, 3 Zones, 70" length)
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2954221: 100mm wafers, 7.5” ID, 12” OD, up to 1200° C.
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2954914 & 2962050: 125mm wafers, 8.25” ID, 13” OD, up to 1200°C. These two elements are electrically identical, and can also use the same profile T/C.
30" Flat Zone (CVD, Low Temperatures, 3 Zones, 68" Length)
Early BDF4 CVD tubes used the same elements as ATMs. Later, two elements were developed, but they weren’t backwards compatible. These were intended to cover both 4” and 5” wafers, but as these had large bores, they are capable of fitting a 6” process tube (max 225mm OD), but most of the furnaces in which they are installed can’t load 6” wafers.
- 2970056: 9.25” WD, 13” OD, up to 850° C. This would be a nitride and TEOS element and has fairly high thermal loss for improved lower temp dynamics.
- 2962052: 9.25” WD, 13” OD, up to 850° C. The element above electrical twin, with the newer insulation and vestibule design.
- 2970414: 9.75” WD, 13” OD, up to 700° C. This is a thermal “higher loss” element. This would be the choice for a poly process. It is only available as the newer insulation and vestibule design.