Inventory Specials

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BDF 200 & System 2000 Heating Elements

These elements come in three applications, and two size ranges; 12.5" and 13.5"WD.  Only the 12.5” is available as a very high temp, the 13.5” being designed for 8” soft-landing and CVD applications.    All the elements are designed as five zone controls with 1 meter flat zones, though that length can vary dependent on the process and hardware used.

200 mm Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 17.5"OD)

  • 12.5”WD A1 is the 8" mid temp application, with a max processing temp of 1200°C.  It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range.  Max process tube OD is 300mm.

  • 12.5”WD Hybrid is similar to the 12.5”WD A1 with APM wire on zone 1 allowing for a more aggressive load push.  This is a lower cost alternative for customers that do not require the higher max temp of an all APM wire element.

200 mm Applications (Unique - 18.0"OD)

  • 12.5”WD APM is the 8" high temp application, with a max processing temp of 1300°C.  It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins.  It is electrically interchangeable with 12.5”WD A1 and 12.5”WD Hybrid.  It would be used with high temp processes (>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses.

200 mm Soft-Landing ATM Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 18.5"OD)

  • 13.5”WD A1 is an 8" mid temp application, used for a soft-landing ATM process with a max processing temp of 1200°C.  It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range.  Max process tube OD is 330mm.

200 mm CVD/Low Temp/Soft-Landing Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 17.5"OD)

  • 13.5”WD LT is the low temp application, with a max processing temp of 900°C, and is used for CVD and low temp anneal applications.  It can also be used for low temperature soft-landing applications.  It uses thinner insulation for more dynamic response at lower operating temperatures.  Max process tube OD is 330mm. 

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