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Elements come in three applications, and two size ranges; 6" and 8". For most applications except very high temp, an 8" element could be used for 6" apps as well, so if a customer is contemplating a wafer upsize, an 8" ready furnace is a nice selling point. The 6" high temp element has a higher temp capability due to its thicker insulation. All the elements are designed as five zone controls with 1 meter flat zones, though that length can vary dependent on the process and hardware used.
150 mm Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 16"OD)
- 10.5”WD A1 is the 6" mid temp application, with a max processing temp of 1200°C. It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range. Max process tube OD is 250mm.
- 10.5”WD Hybrid is similar to the 10.5”WD A1 with APM wire on zone 1 allowing for a more aggressive load push. This is a lower cost alternative for customers that do not require the higher max temp of an all APM wire element.
- 10.5”WD APM is the 6" high temp application, with a max processing temp of 1300°C. It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins. It is electrically interchangeable with 10.5”WD A1 and 10.5”WD Hybrid. It would be used with high temp processes (>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses.
150 & 200 mm CVD/Low Temp Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 16"OD)
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11.5”WD LT is the low temp application, with a max processing temp of 900°C, and is used for CVD and low temp anneal applications. Max process tube OD is 280mm.
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11.5”WD VLM is for very low temp applications, typically in the 200°C to 400°C range. It features thin gauge wire for quick thermal response.
200 mm Applications (Flat Zone - 1 meter, 5 Zones, 71"Length, 16"OD)
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11.2”WD A1 is the 8" mid temp application, with a max processing temp of 1200°C. It would be used for similar applications as 10.5”WD A1, but is sized to take up to a 280mm OD process tube. It uses thinner insulation to accommodate the larger bore, and as such its energy consumption is somewhat higher than the 6" application.
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11.2”WD APM is the 8" high temp application, with a max processing temp of 1275°C. It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins. It would be used with any high temp process
(>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses. It too has higher energy use than the 6" high temp element. This element is the basis for several customer specific applications, each with their own part numbers to differentiate.