High Temperature Elements

Heater design consisting an interlocking spacer design to reduce the heater wire sag at very high temperatures >1250˚C.  

• 150mm (BDF41): 10.5” ID, 16” OD, 70” long.
• 150/200mm (BDF41):  11.25” ID, 16.25” OD, 71” long.
• 200mm (BDF200):  12.5” ID, 18” OD, 71” long.
• Guaranteed Maximum Ramp Rate:
  • 15°C from 600°C to 1050°C
  • 10°C from 1050°C to 1150°C
  • 5°C from 1150°C to Max temp.
• 1 Meter Flat Zone
• 5 Zone Temp Control
• Net Power 32.2 - 41.3KW
• Kanthal APM wire
• 1325˚ - 1350˚C Maximum Temperature

Low Mass, Fast React Elements

Designed consisting of light gauge low mass wiring and reduced insulation to accelerate ramping and cooling for CVD and Low temperature processes up to 900˚C.  This core replaces the existing Bruce 2962079 CVD heating element. 

• 150mm (ph 9652625) 11.7” ID, 16” OD, 70” long, 38” flat zone
• Target Ramp rate  25˚ C/min
• Target Cool down rate 
• 10˚ C/min 900˚C to 600˚C
• 7˚ C/min 600˚C to 400˚C
• 5˚ C/min below 400˚C
• 1 Meter Flat Zone
• 5 Zone Temp Control
• Net Power 32.4KW
• Kanthal A1 wire
• 900˚C Maximum Temperature

Bruce Technologies Inc. manufactured all the Heating Elements for the Apogee Vertical Furnace.  Bruce continues to provide these elements for the existing Apogee installation base. Top

Vertical (Apogee, 5 Zone) Elements

Bruce Technologies Inc. designed and manufactured all the Heating Elements for the Apogee Vertical Furnace.  Bruce continues to provide these elements for the existing Apogee installation base. Top

Pre-Oxidation Elements

Bruce offers the capability to pre-oxidize high temp elements for customers in order to save them from the lengthy time and odor within the fab.

Any of our elements can be requested for this process, please request upon ordering. Top

Rebuilt Heating Elements

Many of the newer high temp Bruce elements have been designed to be rewound, minimizing material disposal requirements, extending their useful life, and lowering long term cost of ownership.   For each rebuild, the components are carefully evaluated for reuse or replacement. 

This service can be extended to other manufacturer’s elements, and where possible, improvements are made to increase performance and/or service life.  Please consult with BTI for evaluation of your specific application and needs.  Top

BDF 41 Heating Elements

Elements come in three applications, and two size ranges; 6" and 8".  For most applications except very high temp, an 8" element could be used for 6" apps as well, so if a customer is contemplating a wafer upsize, an 8" ready furnace is a nice selling point.  The 6" high temp element has a higher temp capability due to its thicker insulation.  All the elements are designed as five zone controls with 1 meter flat zones, though that length can vary dependent on the process and hardware used.

• 10.5”WD A1 is the 6" mid temp application, with a max processing temp of 1200°C.  It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range.  Max process tube OD is 250mm.
• 10.5”WD Hybrid is similar to the 10.5”WD A1 with APM wire on zone 1 allowing for a more aggressive load push.  This is a lower cost alternative for customers that do not require the higher max temp of an all APM wire element.
• 10.5”WD APM is the 6" high temp application, with a max processing temp of 1300°C.  It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins.  It is electrically interchangeable with 10.5”WD A1 and 10.5”WD Hybrid.  It would be used with high temp processes (>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses.

• 11.5”WD LT is the low temp application, with a max processing temp of 900°C, and is used for CVD and low temp anneal applications.  Max process tube OD is 280mm. 

• 11.5”WD VLM is for very low temp applications, typically in the 200°C to 400°C range.  It features thin gauge wire for quick thermal response.

• 11.2”WD A1 is the 8" mid temp application, with a max processing temp of 1200°C.  It would be used for similar applications as 10.5”WD A1, but is sized to take up to a 280mm OD process tube.  It uses thinner insulation to accommodate the larger bore, and as such its energy consumption is somewhat higher than the 6" application.

• 11.2”WD APM is the 8" high temp application, with a max processing temp of 1275°C.  It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins.  It would be used with any high temp process
  (>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses.  It too has higher energy use than the 6" high temp element.  This element is the basis for several customer specific applications, each with their own part numbers to differentiate. Top

BDF 200 & System 2000 Heating Elements

These elements come in three applications, and two size ranges; 12.5" and 13.5"WD.  Only the 12.5” is available as a very high temp, the 13.5” being designed for 8” soft-landing and CVD applications.    All the elements are designed as five zone controls with 1 meter flat zones, though that length can vary dependent on the process and hardware used

• 12.5”WD A1 is the 8" mid temp application, with a max processing temp of 1200°C.  It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range.  Max process tube OD is 300mm.

• 12.5”WD Hybrid is similar to the 12.5”WD A1 with APM wire on zone 1 allowing for a more aggressive load push.  This is a lower cost alternative for customers that do not require the higher max temp of an all APM wire element.

• 12.5”WD APM is the 8" high temp application, with a max processing temp of 1300°C.  It utilizes APM wire throughout, with upgraded insulation, spacers, and stainless steel skins.  It is electrically interchangeable with 12.5”WD A1 and 12.5”WD Hybrid.  It would be used with high temp processes (>1100°C) and is recommended with any process using Silicon Carbide process tubes due to their high thermal losses.

• 13.5”WD A1 is an 8" mid temp application, used for a soft-landing ATM process with a max processing temp of 1200°C.  It is typically used for wet oxides and doping processes in the 1000°C to 1100°C range.  Max process tube OD is 330mm.

• 13.5”WD LT is the low temp application, with a max processing temp of 900°C, and is used for CVD and low temp anneal applications.  It can also be used for low temperature soft-landing applications.  It uses thinner insulation for more dynamic response at lower operating temperatures.  Max process tube OD is 330mm.  Top

BDF 4 Heating Elements

They are available in two flat zone lengths, 30” (75cm) or 40” (1m).  40” flat zone elements require a special transformer with increased power capability and special bezel set-ups.  Early BDF4s were configured with this on an as needed basis.

• 2950704 & 2962048:  100mm wafers, 7.5” ID, 12” OD, up to 1200° C.  Will fit all BDF4s, and BDF8s. 
• These two elements are electrically identical, and can also use the same profile T/C.  The difference is in the end vestibules.  The 2962048 is the newer, better element from a process tube seal and construction standpoint, but most of the elements in the field, (and subsequent replacement requests), are for 2950704. 
• 2950510 & 2962047:  125mm wafers, 8.25” ID, 13” OD, up to 1200° C.  Will fit all but the earliest BDF4s (pre 1980)
• These two elements too are electrically identical, and can also use the same profile T/C.  The difference is in the end vestibules.  Same issues as above.
• Most 5” replacement elements purchased are 2950510.
• 9650950:  150mm wafers, 9.25” ID, 13.25” OD, up to 1150° C.
• These elements will only fit specific post-1989 BDF 4s.  The furnaces were built to accommodate the up-size. The furnace system must also have a BDF41 style load station for tubes 1 & 4 to have sufficient space to fit the wafers.

• 2954221:  100mm wafers, 7.5” ID, 12” OD, up to 1200° C. 

• 2954914 & 2962050:   125mm wafers, 8.25” ID, 13” OD, up to 1200°C.  These two elements are electrically identical, and can also use the same profile T/C. 

Early BDF4 CVD tubes used the same elements as ATMs.  Later, two elements were developed, but they weren’t backwards compatible.  These were intended to cover both 4” and 5” wafers, but as these had large bores, they are capable of fitting a 6” process tube (max 225mm OD), but most of the furnaces in which they are installed can’t load 6” wafers.

• 2970056: 9.25” WD, 13” OD, up to 850° C.   This would be a nitride and TEOS element and has fairly high thermal loss for improved lower temp dynamics.
• 2962052: 9.25” WD, 13” OD, up to 850° C.  The element above electrical twin, with the newer insulation and vestibule design. 
• 2970414: 9.75” WD, 13” OD, up to 700° C.   This is a thermal “higher loss” element.  This would be the choice for a poly process.  It is only available as the newer insulation and vestibule design. Top