Bruce Technologies Inc. guarantees the performance of its Atmospheric and VCVD systems, using BTI demonstrated recipes, to meet the process specification listed below. Demonstration of this performance at the customer location, using customer-supplied materials, constitutes fulfillment of this guarantee. The furnace, controller, and gas delivery systems are not affected by this guarantee

• Pyrogenic Oxidiation
• Dry Oxidation
• Nitrogen / Oxygen Annealing
• H2 Annealing
• Liquid Deposition: POCL or BBR3

Safety Features

Due to the nature of the source gases, most safety interlocks are contained for processing panels using H2 flow.  A typical pyrogenic oxidation system includes:

• Automatic N2 bypass purge to provide an auto-purge of the process tube on power failure and/or a system configured remote interrupt (i.e. exhaust flow sensor).

• Programmable ratio slave control of the H2 and O2 mass flow controllers, limited to a maximum 2:1 ratio of H2 to O2 when an H2 gas request is present.

• Undertemperature alarm circuit interlocked with the H2 air pilot valve and including a type KPII thermocouple for heater core source zone installation (internal torch use) alarm circuit preset at 760°C generates a 7355 or 7351 DDC alarm.  This insures proper temperature for H2 ignition.

• Mechanical flow restrictor upstream of any H2 mass flow controller selected to match the maximum MFC flow.

• All downstream air-op valves of mass flow controllers are normally closed operation.

• Remote interrupt of the H2 flow stream capability for use with a low N2 pressure sensor switch located in the source cabinet inlet manifold.

• Flow sensors located downstream of O2 mass flow controllers to insure adequate H2/O2 combustion and/or proper TCA reaction.  This flow sensor is interlocked to the applicable H2 and/or low N2 (TCA carrier) air-op valves in the case of insufficient O2 flow.  Trip point is set at 20% of maximum MFC flow.

• Leak Testing to 10-8 cc/sec HE.

The H2 anneal processing systems will include:

• Automatic timed N2 bypass purge both prior to and following the introduction of H2.  Includes a N2 flow sensor interlocked with a timing circuit (factory set at 15 min).  This is to insure proper process tube purge when using high levels of H2 gas.

• Series 7900 firmware “door interlock” with 7355 Microcontroller alarm, inhibiting H2 process gas flow when the tube door is not closed.

Going 150 mm in a BDF 4

Running 125mm on a BDF 4 and want to move up to 150mm but keep the same (or near same) recipe and don't require more than 3 zone control, than we might have an affordable option for you. The BDF 30 is a proven solution for those don't want want to buy a new or used furnace and can live with the capacity from (3) stack 150mm BDF 4.

• Complete Scavenger/Furnace Replace
• Easy installation
• Retain all knowledge base of the 7351 controls
• Gain a process tubes worth of spare parts

General Services

Bruce Technologies offers a variety  horizontal furnace upgrades that are specifically designed to maximize performance and minimize cost-of-ownership. With over 30 years of OEM experience, Bruce Technologies remains your first choice for all types of furnace equipment upgrades. The list below represents a small sample of available retrofits.

Compete Furnace Rebuilds:

• Consolidation (2) furnaces into (1)
• Used Furnace & Automation utilizing customer owned materials
  
  

Wafer Size Conversions:

• BDF 4: 125mm to 150mm
• BDF 41: 150mm to 200mm
  
  

Process Conversions:


• Clean POCL3 from existing POCL3
• Apogee Vertical: Poly to Nitride Gas
  


Boatloader & Wafer Loading Upgrades:


• Auto-Door Closures
• Softlanders
• Boatloaders: 7670 to 7680 Controls


Control System Conversions:

• 7351 DDC (New or Used)
• 7355 DDC (New or Used)
• Retrofiting to other OEMs