BDF-Series
Horizontal Batch Furnaces
With over 5,400+ horizontal furnace tubes shipped worldwide, Bruce
Technologies inc. is a worldwide market share leader for digitally
controlled horizontal furnaces. Bruce Technologies is the only
horizontal furnace manufacturer that designs and manufactures its own
heating elements and thermal control systems. This competitive
advantage has allowed BTI to offer integrated thermal processing
solutions specifically designed for optimum equipment
performance.
For over three decades, Bruce Technologies horizontal furnaces have
earned the distinction of being called "workhorses" based on
their superior reliability and performance. Bruce Technologies's
BDF-Series of horizontal furnaces offer customers proven reliability,
state-of-the-art thermal technology, precision automation,
significantly reduced cost-of-ownership (COO) and the support of a
world-class process application organization.
Bruce Technologies offers two models of horizontal furnaces able to
handle 100-200mm wafer processing; the BDF-41 and BDF-200 Each system
has extremely flexible configurations to meet specific customer needs.
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Each furnace system consists of
five modules:
- Load Station
- Scavengers
- Furnace Module
- Source Cabinet
- Control
Cabinet
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For advanced automation options, Bruce Technologies offers a semi-automated
elevator module as well as a fully automated Robotic Transfer System
(RTS-1™). All of these products are designed to interface with
APEX™, Bruce Technologies's leading process management software
system.
BDF- 41 & BDF- 200 Horizontal
Furnaces
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Number
of Tubes:
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4 (BDF-41),
3 (BDF-200)
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Wafer
Size:
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100-200mm
(BDF-41), 150-200mm (BDF-200)
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Load
Station Filtration:
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Class 10 Mirror-Finished Horizontal Laminar Flow (HLF)
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Wafer Loading:
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SiC Cantilever Loading (Standard), Softlander
& Autodoor (Optional)
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Boatloader Mechanisms:
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DURADRIVE™
Heavy Duty Boatloaders & Controllers
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Scavenger
System:
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Individual All-Welded, Electropolished Scavengers
with Dedicated Photohelic Gauges (Atmospheric Systems)
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Scavenger Liners:
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Standard for POCl3 Processes
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Number
of Heating
Element Zones:
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5
(Standard), 3 (Optional)
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Heating Element Flat Zone (Typical):
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Length = 1000mm; Temperature Range
= 400 - 1370° C
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Heating Element Types:
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LPCVD, Atmospheric, High Temperature, Fast Cool
Core®
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Heating Element Removal
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Slide Mechanism (BDF-200)
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Temperature
Controller:
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Intempos®
Intelligent Temperature/Overtemperature Control Module
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Furnace
Exhaust:
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Low Profile Water-Cooled Heat Exchanger
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Source
Cabinet Gas Panel Layout:
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Vertically-Mounted with Point-of-Use Filtration
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Atmospheric HCl Source:
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Schumacher Trans LC® Bubbler with KSEC
Downstream and Bypass Valve Package
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Pyrogenic Oxidation Steam Generation:
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Series 5000 Torch and Controller
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LPCVD Vacuum Components:
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3" Diameter Valves and Plumbing Components
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Tube Removal:
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From the Source Cabinet or Load Station
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Furnace
Controllers:
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Independent Tube Level 7355X DDC's with System UPS
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Automation Options:
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Three-Axis Elevator System, Robotic Transfer System
(RTS-1)
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Process
Management
Software System:
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APEX (Optional), SEC I, SECS II and GEM Compliant
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Safety Codes:
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Conforms to Applicable SEMI, NEC, ANSI, NFPA and
OSHA Standards
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Supported Processes:
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Anneal (N2, H2 Forming Gas),
Dry Oxidation (with HCl, TCA or DCE), Pyrogenic Oxidation (with HCl,
TCA or DCE), Liquid Deposition (POCl3, PBr3,
BBr3), Polysilicon (Flat, Ramped, Doped), Amorphous
Silicon, Silicon Nitride, TEOS, HTO, Cross Flow (LTO, PSG, BPSG)
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