A Cleaner POCL3 Solution

New methods in partial pressure configuration lend themselves to a cleaner POCL3 environment. Ask how a partial pressure POCL3 configuration can help...

• Reduce the amount POCL3 going out the scavenger
• Provide for easy collection and disposal of residual POCL3
• Provide for a reduction in start-up/qual time

Going 200 mm in a BDF 41

With a great number of (3) and (4) stack horizontal furnaces sold into 200mm fabs, we can honestly state that having a single-tube vertical is not the only you have available. Please consider the economic benefits a (3) or (4) stack horizontal has over a single-tube vertical for nearly the same price and much smaller foot-print. Economic options available...

• Use an existing BDF 41 to move from 150mm to 200mm with only minor modifications to the scavenger, elements and process tubes.
• If the process tube needs to be larger, than convert an existing BDF 41 into a BDF 200 with changing out scavenger, mainframe end panels and element supports. Yes, you will lose a process tube, boatloader, transformer, etc. (Consider them spares as you still beat the cost on NOT going over to vertical.)

Going 150 mm in a BDF 4

Running 125mm on a BDF 4 and want to move up to 150mm but keep the same (or near same) recipe and don't require more than 3 zone control, than we might have an affordable option for you. The BDF 30 is a proven solution for those don't want want to buy a new or used furnace and can live with the capacity from (3) stack 150mm BDF 4.

• Complete Scavenger/Furnace Replace
• Easy installation
• Retain all knowledge base of the 7351 controls
• Gain a process tubes worth of spare parts

General Services

Bruce Technologies offers a variety  horizontal furnace upgrades that are specifically designed to maximize performance and minimize cost-of-ownership. With over 30 years of OEM experience, Bruce Technologies remains your first choice for all types of furnace equipment upgrades. The list below represents a small sample of available retrofits.

Compete Furnace Rebuilds:

• Consolidation (2) furnaces into (1)
• Used Furnace & Automation utilizing customer owned materials
  
  

Wafer Size Conversions:

• BDF 4: 125mm to 150mm
• BDF 41: 150mm to 200mm
  
  

Process Conversions:


• Clean POCL3 from existing POCL3
• Apogee Vertical: Poly to Nitride Gas
  


Boatloader & Wafer Loading Upgrades:


• Auto-Door Closures
• Softlanders
• Boatloaders: 7670 to 7680 Controls


Control System Conversions:

• 7351 DDC (New or Used)
• 7355 DDC (New or Used)
• Retrofiting to other OEMs