The industry leader in 300mm horizontal diffusion furnaces. Hundreds of 300mm, 200mm and 150mm diffusion furnaces installed worldwide. The expert source for new furnaces, upgrades, automation, support and parts.
The BDF-41 is a four stack horizontal furnace for up to and including 200mm wafers. With hundreds of installations worldwide, the BDF-41 is known for its thermal control and reliability.
APEX & Controls
Fully automate wafer processing using the APEX supervisory system.
Get replacement elements for any Bruce Diffusion Furnace from the furnace experts.
PARTS, REPAIR & SUPPORT
Upgrades, parts, field service, and technical support – keep your Bruce Furnace going,
The all new 7360 DDC Controller
All 7355x pcb’s have been combined onto a single board that handles the all functionality of the old controller. This new tube independent controller simplifies furnace troubleshooting, slashing furnace downtime.
The S-300 automated multiple boat horizontal furnace cantilever loading system is a low cost system designed to assist the fab operator in safely loading and unloading wafer boats to all cantilevers on a furnace stack.