Horizontal Furnace Experts since 1974

Over 1000 furnaces shipped worldwide

We are the experts on the Bruce Diffusion Furnace because we created it. With over 700 BDF 41s & 500 BDF 4s, we continue to support our customers – many of them with us for decades. It is with great pride that our controls and equipment built 10, 20 and even 30 years ago continue to produce product for our customers.

We are committed to supporting our existing customers with new and refurbished horizontal diffusion furnaces. We also supply the buyers, resellers and refurb-houses with our Atmoscan and Automation products.

With over four decades in the industry, Bruce has the experience necessary to meet your current needs, and to lead the way to advancing technologies.  With our manufacturing center in North America, and experienced professionals located throughout the world –  our team is available to assist you with your equipment, conversions and Apex requests.

Contact us to learn how our team of experts can support your horizontal furnace needs.

History of Bruce Technologies

  • 1968
    Western Electric logo

    1968 - First product shipped

    Bruce Industrial Controls provided precision analog controllers to the glass manufacturing industry and Western Electric Co.

  • 1974

    1974 - BDF-8 Horizontal Furnace Introduced

    Introduced the BDF-8 horizontal diffusion furnace system. (7351 Controls)

  • 1976

    1976 - Company purchased by BTU

    BTU Engineering purchased Bruce Industrial Controls

  • 1976

    1976 - BDF-4 Horizonatal Furnace Introduced

    Introduced the BDF-4 horizontal diffusion furnace system.

  • 1984
    BDF 41 Horizontal diffusion furnace

    1984 - BDF-41 Horizontal Furnace introduced

    Introduced the BDF-41 horizontal diffusion furnace. (7355 Controls)

  • 1986

    1986 - First Automated System

    Introduced the System 2000 horizontal diffusion furnace with full wafer automation.

  • 1992

    1992 - Acquisition by Kokusai Electric

    BTU International and Kokusai Electric entered into a joint venture to form Bruce Technologies International

  • 1996

    1996 - Bruce is a subsidiary of Kokusai Electric

    Bruce Technologies became a solely owned subsidiary of Kokusai Electric.

  • 1996

    1996 - BDF-200 Introduced

    The BDF-200 is a three stack 200mm horizontal diffusion furnace and is the favorite workhorse of analog semiconductor fabs.

  • 1996
    Intempos furnace controller

    1996 - Intempos Introduced

    Introduces advance temperature modules (Intempos). Intempos protects against loss of product wafers due to thermocouple failures, increases wafer throughput, and improves process uniformity and run-to-run repeatability.

  • 2000
    S300 Horizontal Furnace Automation

    2000 - S300 Automation Introduced

    Amtech Systems introduces the S300 stand-alone automation

  • 2004
    Amtech Systems

    2004 - Bruce acquired by Amtech

    Amtech Systems acquires Bruce Technologies establishing manufacturing and sales operations

  • 2012

    2012 - BDF-300 Introduced

    The BDF-300 brings the horizontal diffusion furnace into the 300mm age.   The BDF-300 is the industry leader in 300mm horizontal diffusion furnaces with the most installations worldwide.

  • 2019

    2019 - Bruce is a division of BTU

    BTU International and Bruce Technologies have again become one corporate entity – both having been divisions of the Amtech Group. This change has been approved by the boards of Amtech Corporation, Bruce Technologies and BTU International. BTU and Bruce Technologies have been co-located in one building, in North Billerica, MA.


Legal Information

Some of the information on this web site may contain projections or other forward-looking statements regarding future events of Bruce Technologies Inc.  We wish to caution you that these statements are only predictions and the actual events may differ materially.  Bruce Technologies Inc. undertakes no obligation to publicly release the results of any revisions to any such forward-looking statements that are placed on this web site, or to reflect the occurrence of unanticipated events.

The following are trademarks of Bruce Technologies Inc. that may be registered in some jurisdictions:


Trademarks  United States
Other patents pending
  • APEX
  • APEX Process Management System
  • B Plus Design
  • BDF-4
  • BDF-40
  • BDF-41
  • BDF-200
  • RTS-1
  • SYSTEM 2000
  • 5,948,300
  • 4,872,799
  • 4,854,266
  • 4,802,441
  • 4,753,192
  • 4,752,219
  • 4,701,096
  • 4,573,431
  • 4,276,603
  • 1,247,504
  • 1,217,936
  • 1,114,887