Horizontal Diffusion Furnaces
The BDF, Bruce Diffusion Furnace, is the market leader for horizontal diffusion furnaces for semiconductor applications. Furnaces are offered in wafer sizes up to and including 300mm and in 3 and 4 stack configurations. The BDF-300 is the leader in 300mm horizontal diffusion furnaces with the most installations worldwide. Fully automated systems including cluster tools are available.
Batch processing at tempearatures up to 1200°C
Bruce Technologies is the Original Equipment Manufacturer (OEM) of the Bruce Diffusion Horizontal Furnace. Bruce has a large install base of horizontal furnaces throughout Europe, North America and Asia. Bruce continues to manufacture horizontal furnaces at its headquarters near Boston, MA.