Horizontal Diffusion Furnaces

The BDF, Bruce Diffusion Furnace, is the market leader for horizontal diffusion furnaces for semiconductor applications.   Furnaces are offered in wafer sizes up to and including  300mm and in 3 and 4 stack configurations.   The BDF-300 is the  leader in 300mm horizontal diffusion furnaces with the most installations worldwide. Fully automated systems including cluster tools are available.  

Bruce

Batch processing at tempearatures up to 1200°C

Bruce Technologies is the Original Equipment Manufacturer (OEM) of the Bruce Diffusion Horizontal Furnace.   Bruce has a large install base of horizontal furnaces throughout Europe, North America and Asia.   Bruce continues to manufacture horizontal furnaces at its headquarters near Boston, MA.

BDF-300

BDF-300

The BDF-300 is the market share leader in 300mm horizontal diffusion furnaces.   This 3 stack system is being used by the  industry’s top discrete device manufacturers.

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BDF-200

BDF-200

The BDF-200 horiztonal diffusion furnace was designed to process 200mm wafers.   The BDF-200 is the favorite workhorse of the analog semiconductor industry.

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BDF-41

BDF-41

The BDF-41 is a four stack horizontal furnace for up to and including 200mm wafers.   With hundreds of installations worldwide, the BDF-41 is known for its thermal control and reliability.
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