BDF 41 – 1993 Vintage (DBTB-2)

OEM “As-Is”; Installation Ready; Inspection Report Provided and 90-day warranty on all controls.

DBTB-2 (DIRE-10)

• Tube #1: Oxide (1250°C Max) (O2, H2, N2)
• Tube #2: Oxide (1250°C Max) (O2, H2, N2)
• Tube #3: Flat-Poly  (1000°C Max) (N2, O2, SiH4, PH3, N2)
• Tube #4: Flat-Poly (Plumbed for BPSG; (1000°C Max)  (N2, O2, SiH4, PH3, BCL3, N2)

Source:

• Fab:  International Rectifier
• Original Year Shipped:  1993
• Incoming Condition:  Good

Configuration:

• APEX System: (added)
• Refurbished C3600
• Recipe Management, Process Data Captures, Maintenance. & SPC
• 7355X & Single I/O
• 7680 Boat Loader Controls
• 7680 Boat Loaders
• Diamonds Saddles (1.5” round shaft)
• SiC Paddles (Not Included)
• 43 KvA Transformers
• Element: Used / Good Condition
• Heat Exchanger: Aged; Functional; Leak Checks OK
• Scavenger: Aged; Functional
• Spike TC’s: provided but mostly broken (profile TC not provided)
• MFC: Units 2020 & 1100
• Replaced UPS for 24 volts on controls
• External Torches (removed obsolete/unsafe)
• Bubblers (obsolete/removed/not provided)
• No CVD pumps/heat jackets available

Source Inspection Results:

• Boat Loader: Bearings Need Replaced
• Temperature/Elements: Trigger Boards / SCR packs need trouble shooting
• Power Systems: Main Breaker needs replacing (functional but safety feature fails)
• Gases / Plumbing: T1: 30slm N2 MFC; T2: No Issues; T3: 500slm O2 MFC, BCL3 is Capped at Manifold; T4: 200slm SiH4 MFC, BCL3 is Capped at Manifold

Documents Provided:

• Manuals: Provided
• Inspection Results: Provided
• Original Install Drawing: Provided

Options:

• 200mm Capable: Ready with change in elements, tube supports & door closures
• Torch Capable: Yes
• Bubbler Capable: Yes

Contact Person:

• Phillip Hankins, General Manager
• 18 Esquire Road, Billerica, MA 01862
• (m) 602-502-8864
• (e) phankins@brucetechnologiesinc.com