1996 - Intempos Introduced
Introduces advance temperature modules (Intempos). Intempos protects against loss of product wafers due to thermocouple failures, increases wafer throughput, and improves process uniformity and run-to-run repeatability.
Introduces advance temperature modules (Intempos). Intempos protects against loss of product wafers due to thermocouple failures, increases wafer throughput, and improves process uniformity and run-to-run repeatability.